Plasma processing technologies for thin film formation.
نویسندگان
چکیده
منابع مشابه
Optical diagnostics for thin film processing.
Optical diagnostics are used to probe the plasma or neutral gas above the substrate, particles in the gas or on the surface, the film surface and reactor walls, the film itself, and the substrate during thin film processing. The development and application of optical probes are highlighted, in particular for analyzing plasma/gas phase intermediates and products and film composition, and perform...
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ژورنال
عنوان ژورنال: Journal of the Metal Finishing Society of Japan
سال: 1984
ISSN: 1884-3395,0026-0614
DOI: 10.4139/sfj1950.35.414